Cleanliness grade | Maximum particles/m3 | FED STD 209E | ||||||||||
≥0.1 μm | ≥0.2 μm | ≥0.3 μm | ≥0.5 μm | ≥1 μm | ≥5 μm | equivalent | ||||||
ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | def | class 100 | |||||
ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | class 1,000 | |||||
ISO 7 | c | c | c | 352,000 | 83,200 | 2,930 | class 10,000 | |||||
ISO 8 | c | c | c | 3,520,000 | 832,000 | 29,300 | class 100,000 | |||||
ISO 9 | c | c | c | 35,200,222 | 8,320,000 | 293,000 | room air |
Υπεύθυνος Επικοινωνίας : | William Zhang |
---|